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硅表面金刚石膜红外增透性能研究 被引量:2

Research on the properties of diamond AR films on silicon substrate
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摘要 通过在大面积区熔硅表面沉积金刚石膜,制作硅的红外增透膜。经扫描电镜观察,金刚石膜的颗粒尺寸平均约2μm,晶体颗粒形状规则;测试单面镀膜的红外透过率最高达65%,双面镀膜红外透过率最高达84%;实验证明硅表面金刚石具有一定的抗热冲击性能;分析了硅表面金刚石薄膜的红外增透特性,提出了进一步提高金刚石膜红外增透性能的方法。 Diamond films are deposited on large square melted silicon substrates to prepare anti-reflection(AR) films.The average size of particles of about 2 μm was observed by scanning electron microscope(SEM).The infrared transmission ratio of single face coated silicon reached 65%,and that of double face coated silicon reached 85%.Test results show that the diamond AR films could resist certain thermal shock.The infrared AR features of diamond films were analyzed,and some methods were proposed for improving diamond film AR ability.
出处 《金刚石与磨料磨具工程》 CAS 北大核心 2011年第6期51-55,共5页 Diamond & Abrasives Engineering
基金 中物院重大基金项目"金刚石SAW滤波器的基础问题研究"
关键词 金刚石薄膜 增透膜 红外透过 diamond films AR films infrared transmission
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  • 1李敬起,郭晚土,孙亦宁.金刚石红外增透保护膜[J].真空与低温,1996,2(3):131-133. 被引量:7
  • 2刘文,王质武,杨清斗,刘毅,卫静婷,唐伟群.氮化铝薄膜的光学性质(英文)[J].硅酸盐学报,2007,35(5):616-618. 被引量:5
  • 3[美]杜经宁 黄信凡等(译).电子薄膜科学[M].北京:科学出版社,1997..
  • 4KUTSAY O M,GONTAR A G,NOVIKOV N V,et al.Diamond-like carbon films in multilayered interference coatings fof IR optical elements[J].Diana Relat Mater,2001,10:1846-1849.
  • 5McGEOCH S P,PLACIDO F,GOU Z,et al.Coatings for the protection of diamond in high-temperature environments[J].Diana Relat Mater,1999.8:916-919.
  • 6HARRIS D C.Properties of diamond for window and dome applications[J].Proc SPIE,1994,2286:218-228.
  • 7MOLLART T P.The development of CVD infrared optics from planar windows to missile domes[J].Proc SPIE,2003,5078:127-136.
  • 8THOMAS M E,GREEN W J,YANG D I,et al.Measurement of absolption and scattering properties of CVD diamond[J].Proc SPIE,2001,4375:218-223.
  • 9JOHNSON C E,HASTING M A S,WEIMER W A.Thermogravimetric analysis of the oxidation of CVD diamond films[J].J Mater Res,1990,11:2320-2325.
  • 10WORT C J H,SWEENEY C G,COOPER M A,et al.Thermal properties of bulk polyetystalline CVD diamond[J].Diam Relat Mater,1994,3(9):1158-11167.

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