旋转CVI快速沉积热解碳基体

RAPID DEPOSITION OF PYROLYTIC CARBON MATRIX USING ROTATING CHEMICAL VAPOR INFILTRATION

采用一种新的CVI工艺 (旋转CVI)进行了二维碳布沉积热解碳基体的实验研究 .通过实验优化工艺参数 ,在低压 ( 5kPa)、高温( 1 1 0 0℃ )、体积分数为 62 .5%的C3H6 与 3 .5mm·min- 1的碳布旋转线速度条件下 ,获得了微观孔隙中 0 .2 5μm·h- 1的热解碳沉积速度、约 7%的C3H6 转化率与理想的热解碳基体形貌 .分析了旋转CVI工艺中沉积温度和C3H6 浓度等分别对沉积速度、热解碳基体形貌及C3H6 转化率的影响 .

Experimental studies were conducted to deposit the carbon matrix on a 2_dimension carbon cloth using a new process of rotating chemical vapor infiltration (CVI). Under rapid deposition rate, a pyrolytic carbon matrix with high propylene conversion efficiency (about 7%) and ideal microstructure was obtained through optimal parameters. The process conditions were:low pressure (5 kPa), high temperature (1 100 ℃), high propylene concentration (62.5% in volume), and rotational linear velocity of 3.5 mm·min^-1. The effect of deposition temperature and propylene concentration on deposition rate, microstructure of pyrolytic carbon matrix and conversion efficiency of propylene in RCVI process was studied respectively.