平面直热式气敏元件及其表面修饰

Planar directy heated gas sensor and its surface modification

采用液相掺Sb的共沉淀方法制备低阻SnO2 纳米微粉 ,以其为敏感材料掺入Pt2wt%及Au5 .4at %的催化剂 ,在Si衬底上制作了平面直热式气敏元件。利用 2 %的Co(NO3 ) 3 溶液作为修饰液对元件进行表面修饰 ,可制得对NH3 具有较高灵敏度及选择性的敏感材料。

Low resistance nanocrystalline SnO 2 powders were prepared by sol-gel chemical coprecipitation tech- nique in Sn 4- and Sb 3+ solution.Planar directy heated gas sensors were fabricated in Si substrate with SnO 2 + Pt 2wt%+Au 5.4at% as sensing materials.The sensitive and selective gas sensors for NH 3 were obtained by surface modification used Co(NO 3) 3 salutation.