微型三轴振动传感器关键技术研究

Study of the main technology of the miniature triaxial vibration transducer

提出了微型三轴振动传感器的关键技术。为实现微型化 ,在结构设计、电路设计及传感器电桥组成形式等方面采取相应措施。电子元件选用表面安装元件 ,运用表面安装技术 ,解决了微型化技术难点 ;采用调整阻尼比技术 ,解决了传感器的低量程、高频响的技术难点。

The key technique of the miniature triaxial vibration transducer was procided.For achieving the miniaturization, some relevant measure was adopted in the srtucture designing ,circuit designing and the forming type of the transducer's bridge .By selecting the electric components with the surface setting means ,adopting the surface setting technique,the difficulties of miniaturization was settled.Depending on the damping ratio adjusting, the low measurement range and the high frepuency response was realized.