微加速度传感器硅微结构设计

Design of silicon microstructure for micro electro-mechanism sensor system

:围绕加速度信息 ,探讨微机电加速度传感器的设计和分析 ,提出了微机电传感系统硅微结构设计的原则 ,并根据典型的弹性质量系统 ,建立了其过载变形的模型 ,给出了用于计算位移加速度关系系数的方法。

Designing and analyzing of micro electro-mechanism accelerometer is discussed surrounding accelera tion information at first,the designing principles of silicon microstructure of micro electro- mechanism sensor system are presented secondly, at last deflection model of the mass over loaded in allusion to typical system of elasticity quality is constracted,and a method used to compute relationship coefficient between displacement and acceleration is given out.