摘要
随着电子器件朝着高性能、小尺寸和长寿命方向发展 ,传统的寿命试验可靠性评价方法的局限性日益显著。近年来得到的大量研究结果表明 ,对于大多数电子器件 ,噪声是导致器件失效的各种潜在缺陷的敏感反映 ,噪声检测方法以其灵敏、普适、快速和非破坏性的突出优点 ,正在发展成为一种新型的电子器件可靠性表征工具。本文对该领域目前的研究进展做了概括性的评述。
The conventional reliability evaluation of lifetime tests in limited with the development of electron devices toward excellent performance,small size and high reliability.It is shown from a lot of recent evidences that noise in electron devices is a sensitive measure of various reliabilitydependent defects,and hence noise measurement is expected to be a general,fast and nondestructive tool to characterize reliability in these devices.A review of recent development on the new technique is presented in this papar.
出处
《微电子技术》
2000年第2期38-45,共8页
Microelectronic Technology
关键词
电子器件
噪声
可靠性
Electron device,Noise,Reliability,Defect
