摘要
采用热丝化学汽相淀积 (CVD) ,未用别的辅助措施 ,合成了 (10 0 )晶面的金刚石膜。结合CVD金刚石成核的微观过程 ,探讨了定向金刚石膜的形成机理。发现和研究了表面扩散对CVD金刚石成核的重要影响。
Oriented (100) diamond film is deposited on silicon substrate by adjusting process parameters without use of other assisted measures in hot-filament CVD system.Mechanism of its synthesis is discussed based on microprocess of the nucleation of CVD diamond.A great impact of surface diffusion on CVD diamond nucleation is discovered and investigated .
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2000年第2期150-152,共3页
Semiconductor Optoelectronics
基金
湖南省计委和科委资助项目
