摘要
介绍了 C- V测量技术特点及其在半导体工艺检测上的应用 ,这对提高工艺质量及产品的可靠性起着重要的作用。
The characteristic of C V measurement techniques and its application for semiconductor process detection are introduced.It is very important to improving the quality of technology and the reliability of products.
出处
《半导体技术》
CAS
CSCD
北大核心
2000年第3期29-31,33,共4页
Semiconductor Technology
