衍射微透镜在红外单元探测器中的应用

Application of Diffraction Micro-Lens to Infrared Detector

研究了衍射微透镜提高红外探测器探测能力的方法 ,通过实验将衍射微透镜耦合到红外单元探测器上 ,使耦合组件的响应度提高到 3.2倍、比探测率提高到 4.2倍。结果表明 :采用微透镜作光聚能器后 ,探测器光敏面面积可减少而光能利用率增加 ,探测性能提高。衍射微透镜结构小 ,有利于与探测器集成 ,其研究极具实用价值。

A method for improving the detection capacity of IR detector with diffraction microlens is studied in the paper.Through experiments,the diffraction micro lens is coupled into IR detectors,thus the responsibility of the coupled module is raised to 3.2 times and the specific detectivity is raised to 4.2 times.The results show that with micro lens as light condenser,the light sensitive area of the detector can be reduced and light energy availability can be increased,thus the detection performance is improved.The micro lens is good for integration of detector because the volume of the diffraction micro lens is small and this study has a large practical value.