摘要
非蒸散型吸气薄膜是大型超高真空系统设备维持超高真空的重要材料,近来又成为基于物联网应用的MEMS器件维持可靠性和长寿命的关键材料。本文综述了非蒸散型薄膜吸气剂的基本原理、材料体系和制备技术,介绍了国内外吸气薄膜的材料现状、结构与性能、多功能化的最新进展,讨论了增大比表面积、调控纳米级精细结构的调控、实现多功能化和提高沉积精度是未来吸气薄膜技术的发展趋势。
The latest progress in the field of the non-evaporable getter film materials was reviewed in a thought provoking way.The discussions centered on the gettering mechanisms of the NEG films,various types of NEG materials,advanced processing and functionalization technologies,and potential applications,particularly in packaging a variety of devices fabricated by micro-electro-mechanical-system technologies,now widely used in the assembling a variety of hardware for the Internet of things because of their high reliability and long life.In addition,the development trends in the research of the gettering materials,such as the nano-structure fabrication,increasing of specific surface,and functionalization,as well as its potential applications,were also tentatively discussed.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2012年第4期341-346,共6页
Chinese Journal of Vacuum Science and Technology
关键词
真空维持技术
非蒸散型吸气薄膜
磁控溅射法
纳米尺度精细结构
多层膜功能化
Vacuum maintaining technology
Non-evaporable getter films
Magnetron sputtering
Nano-scale fine structure
Multi-layer function