摘要
针对一种IC制造装备中的双工位交换工作台系统的结构,建立其动力学模型。根据系统运动自由度与控制变量较多、运动轨迹较复杂的特点,依据动力学与控制系统分别建模的思想,在AD-AMS软件中建立其运动仿真模型,在Matlab/Sim-ulink中建立其运动控制系统,利用两者的软件接口实现双工位交换工作台系统的联合仿真。通过仿真分析,优化了系统的结构。
According to the structure of a duplex pallet changer which was used in an IC manufacturing equipment,the dynamic model can be built.As the system has the characteristics of high motion freedoms,multiple control variables and complex motion path,based on the thought of modeling respectively between dynamic and control system,by building the motion simulation model in ADAMS,the control model in Matlab/Simulink,the Co-simulation of the duplex pallet changer can be realized by using the software interface of the two.Through the simulation analysis,the structure of the system can be optimized.
出处
《机械与电子》
2012年第4期35-38,共4页
Machinery & Electronics
基金
国家重点基础研究发展计划资助项目(2009CB724205)
国家高技术研究发展计划资助项目(2009AA04Z148)
