应用多模干涉器件的白光干涉仪研究

Study on White-light Interferometer with Multi mode Interferometry Device

基于因光纤通信发展而研制的多模干涉器件的原理和特点 ,提出一种结合多模干涉器件的白光干涉仪 ,并讨论了其典型应用。与微机械技术相结合 。

Base on the principle and performance of the multi mode interferometry (MMI) device,the white light interferometer with MMI device is presented,the typical application is researched.The interferometer can be miniaturized with micro mechanical technology.