期刊文献+

SiO_2钝化层对GaN基PIN结构核探测器漏电流的影响 被引量:3

The Influence of SiO_2 Layer Passivation on the Leakage Current of GaN-based PIN Radiation Detectors
下载PDF
导出
摘要 成功地制备了有SiO2钝化层和无SiO2钝化层的GaN基PIN结构核辐射探测器,并对二者的I-V特性进行了测试。实验结果表明,SiO2钝化层的存在显著地降低了GaN基PIN结构核辐射探测器的反向漏电流,在-40V的反向偏压情况下,漏电流约有2个数量级的降低。实验过程中观测到随着反向偏压的增大,SiO2钝化层对器件反向漏电流的抑制效应更明显。建立了一种表面沟道模型解释了SiO2钝化层对漏电流的影响。 GaN-based PIN radiation detectors with and without SiO2layer passivation have been fabricated.The current-voltage(I-V) properties of the detections we observed in our experiment show that SiO2layer passivation significantly reduces the detectors reverse leakage current.The leakage current is reduced about two orders of magnitude at reverse bias of 40 V.We also observed that inhibitory effect of SiO2layer passivation on the detectors reverse leakage current is more and more obvious with the increase of reverse bias.And a surface channel model has been studied to explain this suppression of SiO2layer passivation for the reverse leakage currents.
出处 《固体电子学研究与进展》 CAS CSCD 北大核心 2012年第2期110-114,共5页 Research & Progress of SSE
基金 国家自然科学基金资助项目(10875084) 江苏省自然科学基金资助项目(BK2008174) 苏州市应用基础研究计划资助项目(SYJG0915) 国家重点基础研究发展计划资助项目(G2009CB929300)
关键词 氮化镓 PIN 探测器 漏电流 钝化层 GaN PIN detector leakage current passivation
  • 相关文献

参考文献11

  • 1Strite S,Morkoc H.GaN AlN and InN[J].A review J Vac Sci Technol B,1992,10(10):1237-1266.
  • 2Shchekin O B,Epler J E,Trottier T A,et al.High performance thin-film flip-chip InGaN-GaN light-emitting diodes[J].Appl Phys Lett,2006,89(7):071109.
  • 3Nakamura S,Senoh M,Nagahama S I,et al.Continuous-wave operation of InGaN/GaN/AlGaN-based laser diodes grown on GaN substrates[J].Appl Phys Lett,1998,72(16):2014.
  • 4Mazzeo G,Conte G,Reverchon J L,et al.Deep ultraviolet detection dynamics of AlGaN based devices[J].Appl Phys Lett,2006,89(22):223513.
  • 5Szweda R.GaN and SiC detectors for radiation and medicine[J].III-Vs Review,2005,18(7):40-41.
  • 6Sellin P J,Vaitkus J.New materials for radiation hard semiconductor dectectors[J].Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,2006,557(2):479-489.
  • 7Grant J,Bates R,Cunningham W,et al.GaN as a radiation hard particle detector[J].Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,2007,576(1):60-65.
  • 8Sze S M.Physics of Semiconductor Devices[M].2nd ed.New York:Wiley,1981:70-75.
  • 9Ohyu K,Ohkura M,Hiraiwa A,et al.A mechanism and a reduction technique for large reverse leakage current in p-n junctions[J].Electron Devices,IEEE Transaction on,1995,42(8):1404-1412.
  • 10丁洪林.核辐射探测器[M].哈尔滨:哈尔滨工程大学出版社,2008:167.

同被引文献22

引证文献3

二级引证文献7

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部