太阳能多晶硅铸锭用石英坩埚氮化硅涂层的免烧工艺

Unfired Process for Silicon Nitride Coating of Quartz Crucible for Solar Poly-silicon Ingots

本文介绍一种太阳能多晶硅片生产过程中，喷涂坩蜗免焙烧的工艺，即在氮化硅浆料中加入少许水溶性有机物（粘结剂、防潮剂、分散剂），通过有机高分子的化学吸附和氮化硅粉的物理吸附作用使氮化硅粉强有力地吸附在坩埚内壁，免去了传统工艺中喷涂坩蜗在坩蜗烧结炉中焙烧21h，焙烧温度为1050℃的工艺。与传统工艺相比，此工艺缩短硅片生产周期，提高生产效率，降低生产成本。

An unfired process is introduced for the spraying crucible during the production process for the solar poly- silicon ingots. Namely a little water soluble organic matter is added into the silicon nitride slurry（The water soluble organic matter is adhesive, damp-proof agent, dispersant）,and then the silicon nitride powder is forcefully adsorbed on the inner wall of the crucible by the chemical adsorption of organic macromolecule and the physical absorption of silicon nitride. Compared to the traditional process which calcinates the spraying crucible at 1050℃ for 21 hours, this process can shorten production cycle, raise production efficiency and economize production cost.