摘要
建立了蜡滴铺展系数与多晶硅片表面粗糙度的准则关系式,运用最小二乘法数据拟合方法得出了蜡滴铺展系数与相关参数的实验关系式。该实验关系式揭示了喷蜡蜡滴在多晶硅片上的铺展直径与多晶硅片表面粗糙度间的函数关系。
The criterion equation of wax drop spreading coefficient and surface roughness of polycrystalline silicon was established.The least square method was applied to fit the empirical formula of wax drop spreading coefficient and related parameters.The empirical formula can be used for predicting the largest spread diameter of wax drop on the polysilicon.
出处
《包装工程》
CAS
CSCD
北大核心
2012年第9期130-134,共5页
Packaging Engineering
关键词
喷蜡印刷
多晶硅片
粗糙度
铺展系数
spray wax printing
polysilicon
roughness
spreading coefficient
