期刊文献+

一种低温共烧压电陶瓷的制备

Piezoelectric Ceramic Multilayers Prepared by a Low-Temperature Co-Firing Process
下载PDF
导出
摘要 压电陶瓷多层膜的低温共烧特性及压电性能密切依赖于其成分。采用调节压电材料成分,以0.90Pb(Zr0.48Ti0.52)O3-0.05Pb(Mn1/3Sb2/3)O3-0.05Pb(Zn1/3Nb2/3)O3四元体系为研究对象,同时添加烧结助剂CuO来实现多层膜的低温烧结。对多层膜的流延、排胶、烧结、极化等工艺进行探索以优化工艺参数,最终获得850℃烧结温度下的高致密度多层压电陶瓷。压电性能的测试表明三层结构的压电多层膜陶瓷表观d33达873pC/N,远高于同成分单层陶瓷306 pC/N的d33值。采用多普勒激光测振仪进行扫频实验,测定了多层陶瓷纵向振动速度的频谱,确定了基于该多层膜压电振子的最优谐振频率。 In this research, piezoelectric ceramic multilayers based on 0.90Pb (Zr0.4s Ti0. 52 ) 03-0. 05Pb ( Mn1/3 Sb2/3 ) 03- 0. 05Pb( Zn1/3 Nb2/3 )03 quaternary system with silver inner electrodes have been successfully prepared. The process of tape casting, sintering, and poling are intensively investigated. The sintering temperature for the muhilayers has been lowered to 850 ~C by using CuO as the additive. High density is obtained in the multilayer structures even at this low sinte- ring temperature. The piezoelectric measurements display that the ceramic with 3 layers presents piezoelectric coefficient d33 of 873pC/N, which is almost linear with the d33 value of 306 pC/N of the monolayer ceramic. The fabricated ceramic multilayers can be beneficial to the integration of the piezoelectric devices.
出处 《中国材料进展》 CAS CSCD 2012年第4期30-33,25,共5页 Materials China
基金 科技部973计划项目(2012CB619406) 教育部博士学科点专项科研基金新教师基金课题(20103218120003)
关键词 低温共烧陶瓷(LTCC) 压电陶瓷 多层膜 low temperature co-firing(LTCC) piezoelectric multilayer ceramics
  • 相关文献

参考文献9

  • 1傅剑,李承恩,赵梅瑜,姚烈,周家光,陈建和.低温烧结PZT压电陶瓷研究进展[J].材料导报,2000,14(1):38-39. 被引量:9
  • 2MengXiangning(孟祥宇) ChuXiangcheng(褚祥诚) BiXiaopeng(毕晓鹏) etal.应用于微电机的共烧多层压电陶瓷的制备及分析.人工晶体学报,2009,38:73-76.
  • 3Yoshihiko lmanaka. Multilayered Low Temperature Cofired Ceramics (LTCC) Technology[ M ]. Japan : Springer, 2004.
  • 4马元,沈建兴,闫春蕾.PZT压电陶瓷液相低温烧结技术的研究进展[J].山东轻工业学院学报(自然科学版),2008,22(4):15-18. 被引量:6
  • 5Corker D L, Whatmore R W, Ringgaard E, et al. Liquid-Phase Sintering of PZT Ceramics [ J ]. J Eur Ceram Soc , 2000, 20: 2 039-2 045.
  • 6Nielsena E R, Ringgaarda E, Kosec M. Liquid-Phase Sintering of Pb(Zr, Ti)O3 Using PbO-WO3 Additive[J]. J Eur Ceram Soc, 2002, 22:1 847-1 855.
  • 7Lu P X, Zhu M K, Xu D H, et al. Low-Temperature Sintering of PNW-PMN-PZT Piezoelectric Ceramics [ J ]. J Mater Res, 2007, 22(9) : 2 410 -2 415.
  • 8WanDandan(万丹丹).Study of Low Temperature Sintering and Doping Modification of PZT-PMS-PZN Based High Power Piezoekectric Ceramics(PZT-PMS-PZN基大功率压电陶瓷的低温烧结及掺杂改性研究)[D].Nanjing:Nanjing University of Aeronautics and Astoonautics, 2010.
  • 9李勇君,裘进浩,朱孔军,季宏丽.PNN-PZT陶瓷流延浆料流变性能研究[J].电子元件与材料,2008,27(12):15-18. 被引量:7

二级参考文献31

共引文献17

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部