摘要
采用偏压增强热丝CVD(HFCVD)法,通过引入惰性气体Ar,在经过甲醇新预处理方法处理后的硬质合金衬底表面成功沉积了微晶/纳米金刚石复合涂层。对金刚石复合涂层的表面形貌、成分、表面粗糙度进行了分析和研究。研究结果表明:新的预处理方法能够提高金刚石薄膜与衬底之间的附着强度。Ar的引入使得金刚石薄膜二次形核率更高,颗粒也更加细小,纳米金刚石复合涂层不但具有高的附着强度,而且具有非常低的表面粗糙度。对于拓展纳米金刚石涂层在精密加工领域中的应用具有一定的作用。
Microcrystalline/nanocrystalline diamond composite coating is successfully deposited on the WC-Co hard alloy substrate by a bias-enhanced hot filament CVD system in the inert gas Ar using methanol solution new pretreatment method for removing the Co in surface of substrate.The surface morphology,composition and surface roughness of diamond composite coating were observed and analyzed.The results show that the new pretreatment method can increases adhesive strength between diamond film and substrate.The introduction of Ar makes the second nucleation rate of diamond film higher and the diamond grains finer.Nanocrystalline diamond composite coating not only has good adhesive strength,but also has low surface roughness.It is certain effect for the nanocrystalline diamond coating widely applies in the precision machining fields.
出处
《热处理技术与装备》
2012年第2期31-35,共5页
Heat Treatment Technology and Equipment
基金
安徽省教育厅项目(No.KJ2010B045)
关键词
纳米金刚石复合涂层
硬质合金
偏压增强热丝CVD
表面质量
nanocrystallin diamond composite coating
hard alloy
bias-enhanced hot filament CVD
surface quality
