摘要
金刚石材料具有最高的声速,与压电薄膜相结合可获得高声速的声表面波器件。该文以改进的传输矩阵计算方法系统研究了12种不同边界条件下AlN/LiNbO3/diamond叠层结构的声表面波波速和耦合系数与AlN和LiNbO3厚度的关系。结果表明:AlN/LiNbO3/diamond的一阶声表面波在一定范围内可保持约9km/s的波速而不随LiNbO3和AlN的厚度而变化;其中4种结构的一阶声表面波耦合系数均可达到8%以上,且可在多种厚度组合下获得。结果显示:AlN/LiNbO3/diamond叠层结构兼具AlN/diamond结构的高声速和LiNbO3/diamond结构高耦合系数的特点,而其一阶波模的稳定波速的特点可克服现有AlN/diamond和LiNbO3/diamond结构的波速与膜厚强关联的缺点,在未来的高频率、高速率无线通信系统中具有潜在的应用价值。
Diamond has the highest acoustic wave velocity; thus a high-velocity surface acoustic wave （SAW） device should be achievable using a layered combing piezoelectric film on diamond. This study investigates the SAW propagation properties of AIN/ LiNbO_3/diamond layered structures for 12 different boundary conditions using a modified transfer matrix method. The results show that the wave velocity of the first wave mode SAW with a high velocity of about 9km/s shows only weak dependence on the A1N and LiNbO_3 film thicknesses. A high coupling coefficient of 8% can be obtained for four of the twelve conditions. This A1N/LiNbOa/ diamond layered structure is very suitable for SAW devices for high-frequency high-throughput wireless communication applications due to its unique SAW properties.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2012年第4期544-549,共6页
Journal of Tsinghua University(Science and Technology)
基金
国家自然科学基金资助项目(61025021
60936002
61020106006)
国家重大科技专项(2009ZX02023-001-32011ZX02403-002)
