摘要
在碱催化体系中以正硅酸乙酯 (TEOS)为前驱体制得SiO2 溶胶 ,采用旋转镀膜法 (spin coating)制备SiO2 光学增透膜。研究了在不同制备条件下对膜层光学性质的影响 ,推算了膜层的折射率及厚度 。
SiO 2 AR coating were made by spin coating, using TEOS as precursor, Sols were obtained in NH 3·H 2O catalysis. The properties of coating have been studied based on the transmittance spectra, the relationships with refractive index and thickness of the coating are deduced and the porosity of coatings was given.
出处
《光学技术》
CAS
CSCD
2000年第2期104-106,共3页
Optical Technique
基金
国家"8 63"416资助项目
