应用QFD方法确定HIC实施SPC的关键工序

Defining the Key Processes of HIC Using QFD Method to Implement SPC

在实施SPC的过程中,针对关键工序开展技术攻关,固化攻关成果,开展质量稳定性控制与评价,保证产品的质量稳定性。但是,在确定关键工序的过程中经常是依据"经验",没有建立起各工序与最终产品质量稳定性的定量表征关系,使得技术攻关存在着一定程度的盲目性。针对混合集成电路生产工艺,应用QFD的方法来确定SPC实施中的关键工序。分析结果表明,应用质量功能展开方法,可以建立起产品质量攻关特性和工艺条件的定量对应关系,对各项指标进行科学的评算和分析,减少了盲目性,为企业的快速发展提供了动力。

The implementation of SPC involves doing technical research to the key processes,solidifying the research results,and controlling and evaluating the quality stability to ensure product quality stability.But in practice,the identifying of the key processes usually depends on＂experiences＂instead of the quantitative characterization of the relationship between each process and the final product quality stability,resulting in a certain degree of blindness with the technical research.In this paper,the key processes of HIC to implement SPC are determined using QFD method.It is shown that the QFD method can be used to establish quantitative corresponding relation between product quality characteristics and process conditions and assess the indicators properly in order to reduce the blindness and provide the impetus for the rapid development of enterprises.