摘要
对干涉图的数字分析法进行了研究 ,首先 ,利用动态条纹扫描技术对干涉图进行数字分析 ,然后与理论计算结果相比较 ,从而获得面形误差数据 ,最后在改进型 SPG- 型激光数字波面干涉仪上进行实测验证 ,表明其测量精度可达 λ/ 2 0 ( PV) .对非球面度较小的非球面面形 ,其检测可通过直接利用标准球面镜作为参考表面在干涉仪上获得“非球面特征干涉图”
Testing of aspherical surface, which is close to a sphere, can be implemented by interpreting the characteristic interferogram of aspherical surface generated in the digital wavefront interferometer when a sphere is used as a reference mirror. Digital analysis of such kind of interferogram has been studied. First the fringe\|scanning phase\|detecting technique is implemented. Then the sampled wavefront is compared to the theoretical one, giving the result of the data of the aspherical surface error. Finally experiment has been carried out in the improved SPG\|Ⅲ digital laser wavefront with the accuracy of λ/20.
