基于衍射理论的高斯像面球差的计算与分析

Calculation and analysis of spherical aberration on Gaussian image plane based on diffraction theory

为了利用波动光学的衍射理论分析处理球差,采用先计算像点的光强分布再进一步分析处理球差的方法,对球差进行了理论分析和模拟。从基于点源圆孔衍射的成像原理出发,经过适当推导得到高斯像面上仅有球差像点的光强分布的解析计算式,分析探讨了高斯像面上球差的衍射机理及其计算与校正。结果表明,这种方法能够更为精细地分析处理球差,有助于在光学设计中对球差进行像差平衡与校正、光学加工中对球差的检测与修正以及数码成像时对球差做电子校正等,有利于促进激光技术和微光学以及微光机电系统的发展。

In order to study how to analyze spherical aberration based on the diffraction theory of wave optics,theoretical analysis and simulation were carried out.Firstly,the light intensity distribution of the image point was calculated and then the spherical aberration was further analyzed and processed.Starting from the imaging principle a circular aperture irradiated by a point source,referring to relevant documents,analytical expression of the intensity distribution of the image point only with spherical aberration on the Gaussian image plane was deduced.The diffraction mechanism and calculation and correction of spherical aberration on Gaussian image plane were analyzed and discussed.The method can handle spherical aberration more accurately.It is helpful for balancing and correction of spherical aberration in optical design and the detection and correction of spherical aberration in optical processing and electronic correction of spherical aberration in digital imaging,and conducive to promote the development of laser technology and micro-optics and micro-optoelectro mechanical systems.