摘要
扫描电镜由于其高分辨率而被广泛应用在材料微观结构的观察,为了能定性地分析出不同材料表面拓扑结构的差异,一种基于电子扫描的Image J图像处理算法系统被开发,结果表明:这种算法系统能够定性分析出材料表面微观拓扑结构的差异,具有较高精确性和广泛适用性。
Scanning electron microscopy has been widely used in microstructure observation of material as its high resolution.In order to qualitatively analyze the difference of different material surface topography,a new image processing algorithm system based on Image J and scanning electron microscopy is developed.The results show that the algorithm system is able to qualitatively analyze the difference of material surface topography,with high-accuracy and broad applicability.
出处
《传感器与微系统》
CSCD
北大核心
2012年第5期150-152,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(11172340)
重庆市科委百名杰出科技领军人才培养计划资助项目
重庆市自然科学基金重点资助项目(CSTC
2010BA5001)
关键词
扫描电镜
图像处理
拓扑结构
材料
scanning electron microscopy
image processing
topography
material
