摘要
用射频磁控溅射技术在蓝宝石衬底上制备了一组不同衬底温度的Mn掺杂ZnO薄膜。质子激发X射线荧光(PIXE)测量表明,薄膜中仅有含量为5 at.%的Mn,未见其它磁性杂质元素(如Fe、Co、Ni等)。同步辐射X射线衍射(SR-XRD)表明,这些Mn掺杂ZnO薄膜具有纤锌矿ZnO结构。SR-XRD和扩展X射线吸收精细结构谱(EXAFS)分析显示,薄膜中未发现Mn团簇或MnO、MnO2、Mn2O3、Mn3O4等二次相,Mn原子是通过替代Zn原子而进入了ZnO晶格。
Mn-doped ZnO films were prepared by radio frequency magnetron sputtering on sapphire substrate at different temperatures.They contained Mn of 5 at.%,without any magnetic impurities of Fe,Co and Ni,as were revealed by proton induced X-ray emission（PIXE）.Synchrotron radiation X-ray diffraction（SR-XRD） showed that the ZnO：Mn films possessed the wurtzite ZnO structure.No precipitates such as Mn cluster or MnO,MnO2,Mn2O3,and Mn3O4were observed by SR-XRD and fluorescence extended X-ray absorption fine structure spectra（EXAFS） in ZnO：Mn films.EXAFS analysis also showed that Mn atoms were incorporated into ZnO crystal lattice by occupying the sites of zinc atoms.
出处
《核技术》
CAS
CSCD
北大核心
2012年第5期321-325,共5页
Nuclear Techniques
基金
国家自然科学基金(10775033
11075038)
上海市重点学科建设项目资助(B107)
