光学系统辅助装调技术研究

Computer Aided Alignment Method for Optical System

光学系统装调技术是高功率激光工程中的关键支撑技术之一。对光学系统装调中影响系统光束质量的误差来源进行了分析,并根据像差的装调方式进行了分类。对这两类像差的辅助装调方式进行了比较和仿真模拟。针对第一类像差,在装调模型中代入失调系统检测得到干涉图,利用计算机辅助装调模型计算出失调量的大小和方向,确定出系统的装调方案。仿真结果显示,对系统调整工作有较好指导作用。针对第二类像差,利用元件加工面形之间波像差的互补性,优化调整光学元件的装校姿态。仿真结果显示,系统的光束质量β由预期的4.916优化为1.187,提高了多元件光学系统的光束质量。

The alignment of optical system is one of the critical techniques in high-power laser technology. Various errors af- fecting image quality in processing and adjustment of optical system are introduced, and these errors are classified into two kinds of aberration according to their symmetry, whose computer-aided alignments are studied and simulated separately. For the first kind of aberration, the interference patterns of a misaligning optical system are loaded into computer-aided alignment model. After misalignment data is given, the alignment scheme is determined based on the analysis. And the result shows that the alignment scheme is feasible and guidable to the alignment of optical system. For the second aberration, optimizing of elements＇ pose is adjusted according to complementary feasibility between wave-front aberrations of processed optical ele- ments. Results show that the system＇s beam quality βis evidently improved from 4. 916 to 1. 187 during ones pose is changed, which demonstrates that this alignment method can also improve beam quality of multi-elements optical systems.