一种单端谐振器去夹具测试方法

A De-embedding Method of Measuring One-port Resonators

介绍了一种单端谐振器去夹具测试的方法。该方法是将夹具误差等效成3项系统误差,利用矢量网络分析仪对夹具的短路、开路和负载状态进行直接测量求得这3项误差,然后通过公式转换得到被测件去除夹具影响后真实的S参数。通过编写优化程序拟合器件的导纳曲线,从而可准确计算出谐振器各等效电路元件值以及品质因数(Q)值。实验证明,该方法准确有效,适用于声表面波单端谐振器和声表面横波单端谐振器。

This paper presents a de-embedding way to measure one-port resonators. This way is to make the fixture errors be equivalent to three systematic errors,thn the short, open and load situation of the fixture was meas- ured directly by the Vector Network Analyzer and these three systematic errors were obtained, the actual S parameter of the measured device could be calculated. The optimized program was written to fit the actual admittance curve, thus the equivalent circuit components values and Q factor strated the de-embedding measuring method was effective one-port resonator. could be calculated accurately. The experiment has demon- and suitable for SAW one-port resonator as well as STW