摘要
介绍了测量系统偏倚及线性分析的概念及方法,通过运用Minitab软件对微机电系统(MEMS)微传声器频响、灵敏度测量系统的偏倚及线性进行了分析,提出了复合测量系统的概念,并对此进行了有效分析,根据研究结果,找到了运用整体偏倚值对测量系统进行修正的方法,并用Minitab对改善后的测量系统进行了预测,应用于生产实际后,提高了MEMS微传声器测量系统测试数据的可靠性。
In this paper,the concept and method of bias and linearity analysis of measurement system are intro- duced, the Minitab software is used to analyze the bias and linearity of the frequency response and sensitivity meas- urement system of MEMS microphone and the concept of complex measurement system has been put forward, and it is effectively analyzed. A method using the whole bias value to correct the measurement system has been discovered and the performance of the improved measurement system has been forecasted by using Minitab software. The reliability of the measured data of MEMS microphone measurement system has been improved greatly.
出处
《压电与声光》
CSCD
北大核心
2012年第3期449-451,共3页
Piezoelectrics & Acoustooptics
基金
国家星火计划基金资助项目(2011GA740047)
山东省国际科技合作计划基金资助项目(201013)
山东省星火计划基金资助项目(2011XH06025)
山东省科学技术发展计划基金资助项目(2011YD16019)
