CVD法制备高纯钛中锆杂质的热力学分析

Thermodynamic Analysis of Zirconium Impurity in High Purified Titanium Prepared by Chemical Vapor Deposition

对化学蒸汽沉积法(CVD法)制备高纯钛及制备过程中锆的行为进行热力学分析。结果表明,在钛卤化温度条件下,杂质元素Zr能够在卤化区生成ZrI2、ZrI3和ZrI4,且更倾向于生成ZrI3和ZrI4。ZrI2、ZrI3和ZrI4不能在沉积区温度下分解,高纯钛中的锆不是通过卤化裂解而是由其它途径携入的。

The preparation of high purity titanium with Chemical Vapor Deposition method（CVD） and thermodynamic behaviors of impurity element Zr were thermodynamic analyzed.The results show that,at the halide temperature of titanium,Zr generates ZrI2,ZrI3 and ZrI4 in the halide source area,and what is more,ZrI3 and ZrI4 tend to be generated.But ZrI2,ZrI3 and ZrI4 cannot decompose in the deposition area,nor is the zirconium in high purified titanium brought by the reaction of halogenation and deposition.