硅压力传感器振动可靠性试验与评估分析

Reliability Test and Evaluation Analysis of Silicon Pressure Sensor under Vibration Stress

以硅压力传感器为研究对象,文中在对该压力传感器失效模式和失效机理调研的基础上,建立了压力传感器在振动应力作用下的失效物理方程,进行了以振动应力为加速因子的恒定应力加速寿命试验;结果表明,在振动应力作用下,传感器的失效物理方程为逆幂律模型;经对试验数据进行统计分析,求得了传感器在振动应力作用下的可靠性参数估计值及加速寿命方程lnη=-6.46034-4.73856lnS;通过对传感器进行可靠性评估,得出了传感器的平均寿命和可靠寿命分别为53246小时和23248小时。

The silicon pressure sensor was taken as the object; in this paper, we built failure physics equation of sensor under the vibration stress based on the failure modes and failure mechanism of pressure sensor, and using vibration stress as the acceleration factor to process accelerated life testing under invariableness stress. The results show that failure physics equation of sensor yields the inverse power law relationship lnη=-6. 46034-4. 738561nS. The estimated value of reliability character and accelerated life equation of sensor under the vibration stress was attained through analyzing testing data and the average life and reliable life of sensor has been attained through reliability evalua- tion were 53246 hour and 23248 hour, respectively.