AOI系统定位偏差分析与标定算法

Positioning deviations analysis and calibrating algorithm of AOI

为了补偿AOI(AutomaticOpticalInspection)机械运动偏差,提高检测程序中元件的定位精度,提出了基于多项式插值的元件坐标标定算法。首先,通过一组实验对检测程序中产生元件偏差的原因进行了定量分析。然后,建立了坐标标定模型,并提出了元件偏差补偿算法。即通过建立网格划分模型,并使用标定坐标来对运动偏差进行补偿,以网格为单位利用多项式插值逼近变形函数标定元件坐标。最后,通过在线编程实验,验证了算法的有效性,并综合比较得出了分段线性插值标定为最优标定算法。

In order to compensate the deviations of mechanical motion of AOI（Automatic Optical Inspection）and improve accuracy of positioning of the components during program designing,a coordinate calibration algorithm based on polynomial interpolation is proposed.First,quantitative analysis for deviation occurrence of elements is carried out through a set of experiments.And then a coordinate calibration model is established and compensation algorithm for element deviation is proposed.Through establishing mesh model the motion deviation is compensated by calibrating coordinate to calibrate the coordinate by utilizing approximate deformation functions of polynomial interpolation with grid as unit.Finally,through programming on-line,the effectiveness of the algorithm is verified,and piecewise linearity interpolation is calibrated as the optimal algorithm after comprehensive comparison.