摘要
横向剪切干涉技术是一种直接测量波面相位分布的光学测量方法,由于其不需要高精度的参考平面,并且能够测量偏离量较大的表面面形偏差,因此得到了更为广泛的应用。但是,通常情况下剪切量大小的选择凭工作经验来确定。为了给出一种定量的剪切量判定方法,论文提出了一种基于Zernike多项式拟合的剪切量判定方法,通过计算机仿真和实验给出了剪切量与测量误差的关系,发现剪切量为测量口径1/10时即可达到良好的测量结果。
Lateral shearing interferometry is an important optical measurement technology which obtains the wave-front phase distribution directly.Due to the ability of measuring surface shape of large deviation without high precision reference plane,it has been used in various fields;however,the selection of shearing displacement depends on work experience.In order to provide an explicit determination method,a shearing displacement determination method based on Zernike polynomial fitting is proposed,and the relation between shearing displacement and measurement error is given by computer simulation and experiment.
出处
《应用光学》
CAS
CSCD
北大核心
2012年第3期511-514,共4页
Journal of Applied Optics
基金
陕西省教育厅项目(2008KW-11,2009JK487)
关键词
横向剪切干涉
Zernike拟合
剪切量
lateral shearing interferometry
Zernike fitting
shearing displacement
