红外探测器三波段高通滤光片的研制

Three-band high-pass filter for infrared detector

红外探测器在空间探测以及目标发现和跟踪技术中具有极为重要的应用,其性能的优劣直接关系到获取数据的准确性和可信性。为了提高红外信号的分析灵敏度,降低探测器的噪声,在(CVD)ZnS基底上,采用电子束及离子辅助沉积技术,研制了3μm～5μm高透、1.064μm～2.5μm波段截止的高通滤光膜。为了有效防止1.064μm波段处的激光对探测器造成的激光损伤,以保证探测器的正常工作,根据激光器的输出功率制备了对1.064μm激光波段具有1%,0.1%,0.01%数量级衰减能力的系列高通滤光膜,使红外探测器更具灵活性与智能化的特征。

Infrared detectors have very important applications in space detection,target detection and tracking technology,the performances of which directly affect the accuracy and credibility of the acquisition of data.In order to improve the sensitivity of infrared signal analysis and reduce the detector noise level,using the electron beam and ion beam assisted deposition technology,the high-pass filter with 3 μm～5 μm high pass rate,1.064 μm～2.5 μm band cutoff was prepared on the chemical vapor deposition（CVD） ZnS substrate.In order to effectively prevent the laser at 1.064 μm band from injuring the detector and ensure the normal work of the detector,according to the laser output power,the high-pass filter film series having 1%,0.1%,0.01% attenuation capability respectively for laser at 1.064 μm wave band were prepared,which made the infrared detector more flexible and intelligent.