摘要
微电子技术对纳米陶瓷材料的需求催生了各种新型纳米陶瓷材料制备与烧结技术的开发与研究。结合纳米晶介电陶瓷的晶粒尺寸效应(即晶粒尺寸与陶瓷介电特性、烧结特性之间的依赖关系),系统介绍了制备纳米晶介电陶瓷材料的低温烧结技术,包括液相烧结、两步烧结、水热压烧结和放电等离子体烧结,重点阐述了各种低温烧结技术的基本原理、使用设备、实验参数,比较了其优、缺点和应用领域,综述了近年来国内外相关领域的研究进展,并对这些技术目前存在的问题和今后的研究方向进行了分析和展望。
Demand of the microelectronics technology for nanoeeramic inspired various development and research on nanoceramics sintering technologies. In this paper, combining with the grain size effect （namely the dependence on dielectric properties and sintering properties with grain size）, various kinds of typical low-temperature sintering technologies of the nanoceramics are systematically introduced, including liquid phase sintering, two-step sintering, hydrothermat hot pressing sintering and spark plasma sintering. Basic principles, equipments, experimental parameters are mainly elaborated, and advantages, disadvantages and application fields are compared and the research progresses in related fields are reviewed. Moreover, future prospects are compared and analyzed for those low-temperature sintering technologies.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2012年第6期872-878,共7页
Journal of The Chinese Ceramic Society
基金
新疆大学石油天然气精细化工教育部和自治区重点实验室开放课题(XJDX0908–2011–07)
新疆大学博士启动基金(BS-100111)资助项目
关键词
纳米陶瓷
晶粒尺寸效应
低温烧结
液相烧结
二段烧结
水热压烧结
放电等离子体烧结
nanoceramic
grain size effect
low-temperature sintering
liquid phase sintering
two-step sintering
hydrothermal hotpressing sintering
spark plasma sintering
