摘要
文章提出了一种以衍射光栅为基准件的二维纳米位移测量系统,阐述了系统的组成和光路结构,分析了系统的测量原理。最后利用Lighttools软件对系统的光学结构进行仿真设计,研究系统干涉信号的变化规律,为后续的光路优化和误差补偿提供了理论模型。
2-D nano-displacement measurement system is developed based on diffraction grating. This system consists of optical structure and electronic subdivision circuit. The measurement principle of the system is proposed. And by the simulation, the change rule is found, theoretical model for the follow-up structural optimization and error compensation is provided.
出处
《现代显示》
2012年第4期19-23,共5页
Advanced Display
