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多孔SiGe/Si异质材料微腔的结构设计与制备

Structure design and preparation of porous SiGe/Si heterostructure material microcavity
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摘要 提出了采用多孔SiGe/Si异质多层结构来获得布拉格反射镜方法.首先采用传输矩阵方法设计了多孔SiGe/Si异质材料微腔结构,并通过超高真空化学气相沉积与电化学阳极腐蚀相结合的方法实验制备了两种结构的微腔,同时对微腔进行光学性质表征,并详细讨论了实验结果. We propose a method for preparing the Bragg reflectors by porous SiC, e/Si heterogeneous multi- layer structure. Two kinds of structure of porous SiGe/Si microeavity are prepared through a method by combining ultra-high vacuum chemical vapor deposition and electrochemical anode, based on the numerical simulations of transfer matrix method. The optical properties of the microeavity are characterized, and the experimental results are discussed in detail.
作者 周笔 陈松岩 李成
机构地区 闽江学院物理学与电子信息工程系 厦门大学物理系半导体光子学研究中心
出处 《闽江学院学报》 2012年第2期49-52,共4页 Journal of Minjiang University
基金 福建省省教育厅基金项目(JB11128) 闽江学院科技启动项目(KQ1004)
关键词 多孔 微腔 SIGE SI ： porous microcavity SiGe Si
分类号 O482.7 [理学—固体物理]
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闽江学院学报
2012年 第2期

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