摘要
电脑硬盘磁头晶片生产中常用的电镀设备分为手动式电镀线和自动式电镀线。分别对两种电镀设备的活化槽、电镀槽、电镀液池、传送装置、循环过滤系统、电气系统及管路系统的维护与保养以及长时间停机时的设备保养方法做了较详尽介绍。
Hard disk drive head wafer production lines are divided into manual and automatic plating lines.Maintenance of the common electroplating equipments for wafer production line such as activation cell,plating cell,bath reservoir,conveyer,cycling filtration system,electrical and pipe system was introduced,and care procedures for long-term idle tools were also discussed.
出处
《电镀与精饰》
CAS
北大核心
2012年第5期21-23,共3页
Plating & Finishing
关键词
电脑硬盘磁头晶片
电镀设备
维护
保养
hard disk drive head wafer
plating tool
maintenance
care