摘要
综述了近几年来对衬底负偏压增强金刚石成核机制的研究,并且对各种机制进行了分析和讨论,提出了今后有待研究的问题。
In this paper,the studies on mechanisms of negative substrate bias enhanced diamond nucleation in recent years were reviewed. Various mechanisms were analyzed and discussed. Some problems to be addressed in fu ture research were outlined.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2000年第4期44-45,共2页
Materials Reports
基金
国家自然科学基金(No
19904016)
