硬质合金表面Mo离子注入对CVD金刚石涂层形成的影响

Influence of Mo Ion-implantation on Surface of Cemented Carbide on Formation of CVD Diamond Coating

采用离子注入工艺对YG6硬质合金表面进行处理,探讨了离子注入处理对硬质合金CVD金刚石涂层形成的影响。研究结果表明,Mo离子注入使硬质合金表面细化,金刚石涂层的粒度减小,改善了金刚石薄膜与合金衬底间的附着力。

In tihs paper we present a new pretreatment method of Mo ion-implantation to improve the adhesion of the diamond coating. A more fined layer has been formed on the surface of WC-Co.and the size of diamond grains has become smaller. Good morphology and adhesion of diamond coating have been obtained.