激光诱导击穿光谱在材料表面分析领域中的应用进展

Application Progress of Laser-Induced Breakdown Spectroscopy for Surface Analysis in Materials Science Field

激光诱导击穿光谱作为表面分析工具是近十年发展起来的,对表面分析基础理论、仪器装置及其在材料科学领域中的应用进行详细的综述。重点阐述了激光诱导击穿光谱在国内外冶金、半导体、电子等材料科学领域中的元素分布分析及镀层分析应用进展,指出激光束单个脉冲能量、环境气体及气压、激光束能量分布等参数对分辨率的影响,同时指出在兼顾灵敏度的前提下提高分辨率的途径。与传统经典表面分析工具相比较具有扫描面积大、分析速度快及样品导电与否均可分析等优点,成为传统表面分析工具的有力补充。

As a truly surface analytical tool,laser-induced breakdown spectroscopy（LIBS） was developed in recent ten years,and in this paper,fundamental theory,instrumentation and it＇s applications in material science are reviewed in detail.Application progress of elemental distribution and depth profile analysis are mainly discussed in the field of metallurgy,semiconductor and electronical materials at home and abroad.It is pointed out that the pulse energy,ambient gas and it＇s pressure,and energy distribution of laser beam strongly influence spatial and depth resolution,and meanwhile a approach to improving resolution considering analytical sensitivity is provided.Compared with traditional surface analytical methods,the advantage of LIBS is very large scanning area,high analytical speed,and that conducting materials or non-conducting materials both can be analyzed.It becomes a powerful complement of traditional surface analytical tool.