基于灵敏度分析的静电传感器优化设计

Optimal design of electrostatic sensor based on sensitivity analysis

对用于金属接触损伤监测的静电传感器进行了优化设计研究。利用高斯定律建立了传感器静电感应的解析模型,利用有限元分析方法获得了静电传感器的灵敏度空间分布规律。并在此基础上,针对不同的设计参数进行了有限元仿真分析,得出设计参数(感应面半径、屏蔽罩厚度、屏蔽罩内径、绝缘体介电常数、感应面内缩长度)对灵敏度空间分布的影响,并在试验台上验证了不同设计参数对接触损伤静电信号的影响,为传感器优化设计提供了依据。

Optimal design of the electrostatic sensor for metal contact damage detection is investigated.An analytical model is presented based on Gauss＇s law.The spatial sensitivity of the electrostatic sensor is analyzed with finite element method（FEM）.The design parameters are varied in the analysis.The influences of the design parameters（such as sensing surface radius,shield thickness,shield inner radius,insulator dielectric constant and sensing surface inner distance） on the spatial sensitivity are investigated and verified on test rig,which provides the basis for the optimal design of electrostatic sensor.