沉积时间对碳纳米管制备的影响

The Effect of Depositing Time on the Carbon Nanotubes Preparation

利用PECVD等离子体增强化学气相沉积系统,成功制备出多壁碳纳米管薄膜。并通过扫描电镜和拉曼光谱进行表征,深入地研究了沉积时间对碳管形貌的影响。结果表明:获得定向性良好、分布均匀、密度适中的碳纳米管的最佳沉积时间是20min。

Muti-walled carbon nanotubes grown are obtained by a technology of plasma enhanced chemical vapor deposition.Their morphology was characterized by scanning electron microscopy and Raman spectrometer.The effect of depositing time on the structure of carbon nanotubes were deeply analyzed.Experimental results show that the optimum depositing time of muti-walled nantubes with vertical arrangement,uniform distribution and moderate density is 20 minutes.