各向异性基底上超薄膜生长的计算机模拟

Computer simulation for growth of ultra-thin films on anisotropic substrate

通过改变原子沿不同方向的扩散概率P ,原子在基底上的扩散步数W及沿周界的扩散步数W′,得到与实验结果一致的分形生长、枝晶状生长、团状生长等生长形态和“台阶流动”

The aggregation of ultra\|thin films on the anisotropic substrate is simulated. The growth morphologies such as fractal, dendritic, dense growth and “step\|flow' are obtained. The control parameters of simulation are the probability of diffusion along different direction P, the diffusion steps W on the substrate and the diffusion steps W′ at cluster perimeter. The simulation results are consistent with the experimental observations.