内表面等离子体浸没离子注入过程的数值模拟

Numerical simulation of plasma immersion lon implantation

采用流体模型对圆筒内表面PIII过程进行了二维数值模拟 ,研究了筒内鞘层扩展和交叉重叠对内表面注入的注入能量和注入剂量的影响 .通过模拟发现 ,内表面注入过程存在注入能量和注入剂量偏低的问题 ,但前者并不十分严重 ,而后者则比较严重 .

Inner surface strengthening of deliberate parts has been a difficult task in the field of surface modification. Plasma immersion ion implantation (PIII), unrestricted by sight light process, is considered a suitable way for deliberate inner surface strengthening. Inner surface PIII process was simulated using two dimensional fluid model, and the influence of sheath expansion and overlapping in the bore on impact energy and retained dose of inner surface was investigated. Lower impact energy and retained dose were found in inner surface PIII, but the former was not very serious, while the latter was. The ion flux with high energy appeared after sheath overlapping in the bore made impact energy and retained dose better.