机械手修正大口径非球面环带误差

Zonal error removal for large aspheric by manipulator

在大口径非球面加工中,采用能动磨盘进行加工,加工效率较高,但能动磨盘加工也会存在着些问题,如严重的边缘效应因为磨盘和工件不能完全的吻合,加工后会存在环带误差和局部误差,表现为镜面的误差分布不对称,也就是通常所说的存在着严重的慧差。在能动磨盘加工后,可以采用机械手小工具对工件的环带进行平滑去除镜面局部高点,修正镜面环带误差,使得镜面误差成对称分布,可以更好地利用能动磨盘进行加工。介绍了机械手小工具的结构,通过实际的加工情况建立小工具磨盘的去除函数模型,并进行了仿真计算。通过与实际去除环带的实验对比,理论仿真和实际加工吻合较好,取得了显著的修正效果。

Computer Control Active Lap（CCAL） technology usually is used in manufacturing large aspherical mir- rors. This technology has more efficient. But still there has some problems, such as severe edge effect. Due to the active lap and the workpiece is not complete contact, the mirror exists zonal and part errors after processing by using CCAL technology. The errors of surface distribute asymmetry, which is usually referred to the existence of a serious coma. A small tool of manipulator can be used to smooth and remove the zonal and local high errors on the mirror. The distribu- tion of the mirror errors is symmetrical after processing by manipulator. Then the CCAL technology can be used better. The structure of manipulator is described. The removal function model is founded through the actual processing. Then some simulations and caiculations of the removal function model are finished. Comparison with the actual smoothed zonal error by the experiment, theoretical simulation inosculates well with the actual result. And the removal impact is received evidently.