计算机控制光学加工技术仿真研究

Simulation of computer-controlled optical polishing

为实现高精度光学元件的面形修正,介绍了计算机控制光学加工技术的基本理论,通过实验法对其去除函数进行了提取,采用迭代法对驻留时间进行了求解,并采用邻域平均值法对边缘数据进行了平滑延拓。以一口径φ100mm的光学元件面形为例进行了模拟加工,得到了其驻留时间分布和加工后面形,加工1843.3min后其面形由初始的PV值243.132nm、rms值53.154nm降为PV值21nm、rms值1.6nm,面形精度改善明显。结果表明:所得去除函数可以用于高精度面形修正,但加工效率仍需提高,所用驻留时间求解方法精度较高,并且经平滑延拓后边缘效应得到有效控制,为后续的实际高精度面形修正提供了理论依据。

In order to modify the surface figure of high precision optics, the basic theory of computer-controlled opti- cal polishing technology is introduced. The removal function is gained in the experiment and the dwell time is solved by it- eration, and then the fringe date is extended with average algorithm. The process o＇f a φ100mm diameter optics is simula- ted as an example. The distributing of dwell time and surface figure processed are gained. Its surface figure accuracy peak-to-valley （PV） is improved from initial 243. 132rim to final 21nm, and root-mean-square （rms） is improved from in- itial 53. 154nm to final 1.6nm after 1843.3 minutes. The high precision optics can be figured using the removal function gained, and the precision of the dwell time solving method is high. In the meantime, the edge effect is well controlled with date expansion. Some theory base is provided for the practical high precision surface figuring.