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“金属薄膜层附着性”试验方法 被引量:3

Test Method of Metal Film Attach Property
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摘要 金属薄膜层附着性的“扯带”试验中胶带纸本身的粘结强度起着重要的作用 ,胶带纸的粘结强度过低或过高都不能正确评价金属薄膜层的附着性。因此需要对胶带纸的粘结强度提出一个要求。为此给出试验过程中能同时测定胶带纸粘结强度的试验方法。 A dhensive strength of adhensive tape itself is important in“pull tape”test on metallization layer adhension.Neither too high nor low adhensive strength can evaluate metallization layer attaching property correctly.So specific requirement to adhensive strength of tape is needed.This paper gives test method of mensurating adhensive strength of tape in the test simultaneously.
出处 《微电子技术》 2000年第1期48-50,共3页 Microelectronic Technology
关键词 金属薄膜层 附着强度 试验 胶带纸 Metallization layer,Adhensive strength,Test method
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