GaAs集成电路芯片在片直接故障检测分析

Direct fault detection and analysis of GaAs IC's chip on wafer

介绍了一种实用的电光采样测试系统 ,其稳定的光学系统结构可保持精度几年不变 ,单位带宽电压灵敏度为 2 5 2mV/Hz。改进了电子移相扫描法 ,利用倍频移相扫描法对GaAs动态分频器芯片故障进行了在片检测分析。

This paper introduced a practical electro optic Sampling system,its optical system construction can hold the stability with designed precision for a few years,the voltage sensitivity of unit detection bandwidth is 2.52mV/Hz.Improved the method of electronic phase shift scanning,and the fault detection and analysis for the GaAs dynamic divider chip have been made using double frequency phase shift scanning.