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Ⅲ-Ⅴ族化合物低维半导体材料制备技术及进展 被引量:6

Progress in Preparation Technology for Low Dimension Semiconductor Materials of Ⅲ-Ⅴ Compounds
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摘要 低维半导体材料特别是Ⅲ -Ⅴ族化合物低维半导体材料日益受到人们的重视和深入的研究。文章回顾和评述了近几年Ⅲ -Ⅴ族化合物低维半导体材料包括量子阱、量子线、量子点的制备技术的进展 ,展望了这些技术在光电子器件等方面的应用前景。 Low dimension Ⅲ-Ⅴ semiconductor compounds have attracted great attention because of its unique properties.The progress in preparation technology of the low dimension materials is reviewed,such as quantum wells,quantum wires and quantum dots.Technologies for the fabrication of optoelectronic devices are forecasted.
出处 《半导体光电》 CAS CSCD 北大核心 2000年第1期6-10,共5页 Semiconductor Optoelectronics
关键词 Ⅲ-Ⅴ族化合物 低维材料 半导体材料 制备技术 compound low dimension material semiconductor material
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