微机电系统中热分析的几个问题

Several Issues of Thermal Analysis in the Microelectromechanical

本文针对微传热学及其热分析给出一个理论描述 ,以期促进 MEMS设计理论及研究方法的发展 ,适应设计与制造技术趋于一体化研究的需要。

Aiming at promoting the development of the design theory and research method of the Microelectromechanical Systems(MEMS), and adapting to the demand of the tendency in which the research on the technology of design and fabricate will be integrated, this paper gives a theoretical description on Micro-Heat-Transfer and it′s thermal analysis.