摘要
随着传感器技术的发展和测量方法的改进,各种精密测量仪器的性能得到了很大的提高,但是振动干扰很大程度上限制了精密仪器的性能发挥,尤其在各类高分辨率测量场合和超精密加工制造过程更是如此。本文设计了以空气弹簧为主要元件的隔振平台,并对隔振平台的性能进行了测试,实验证明该隔振平台可以有效地隔离和减小外界振动的影响,满足精密测量的性能要求。
With the development of sensor technique and improvement of measure method, the performance of precise measurement equipment has been improved greatly. But the vibration interferes the performance of these precise equipment seriously, especially in the high resolution measurement and ultra - precision machining. A kind of vibration isolation table with the major component of air spring is designed. Its performance is tested, and the results prove that this platform can isolate and minish the effect of vibration well and satisfy the demands of high precise measurement.
出处
《工具技术》
2012年第5期82-85,共4页
Tool Engineering
关键词
精密测量
振动
空气弹簧
隔振平台
precise measurement
vibration
air spring
vibration isolation table
